CHEMICAL VAPOR-DEPOSITION OF TITANIUM DISULFIDE

被引:11
作者
MOTOJIMA, S
ITOH, K
TAKAHASHI, Y
SUGIYAMA, K
机构
关键词
D O I
10.1246/bcsj.51.3240
中图分类号
O6 [化学];
学科分类号
0703 ;
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页码:3240 / 3244
页数:5
相关论文
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