SURFACE STOICHIOMETRY DETERMINATION USING REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION AND ATOMIC-LAYER EPITAXY - THE CASE OF ZNTE(100)

被引:30
作者
DAUDIN, B [1 ]
TATARENKO, S [1 ]
CUNFF, DB [1 ]
机构
[1] UNIV GRENOBLE 1,SPECTROMETRIE PHYS LAB,CNRS,F-38402 ST MARTIN DHERES,FRANCE
来源
PHYSICAL REVIEW B | 1995年 / 52卷 / 11期
关键词
D O I
10.1103/PhysRevB.52.7822
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Using reflection high-energy electron diffraction analysis of the relaxation process in highly strained heterostructures grown by atomic-layer epitaxy, a method is proposed to provide a quantitative determination of the surface stoichiometry. Applying this method to the case of the ZnTe(100) surface, we have found that a c(2X2) Te-rich reconstruction observed below 240 degrees C involves 1.5 ML of Te atoms. Consistent with this result, we also propose a microscopic model for the growth of ZnTe in atomic-layer epitaxy, and we demonstrate the relationship between growth rate and surface reconstruction.
引用
收藏
页码:7822 / 7825
页数:4
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