INVESTIGATION OF INAS AND GASB BY HIGH-RESOLUTION ELECTRON ENERGY-LOSS SPECTROSCOPY

被引:10
作者
THIRY, PA [1 ]
LONGUEVILLE, JL [1 ]
PIREAUX, JJ [1 ]
CAUDANO, R [1 ]
MUNEKATA, H [1 ]
LIEHR, M [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词
D O I
10.1116/1.574682
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:603 / 606
页数:4
相关论文
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