APPROXIMATE THEORY OF HIGHLY ABSORBING POLYMER ABLATION BY NANOSECOND LASER-PULSES

被引:53
作者
FURZIKOV, NP
机构
[1] Technological Laser Research Center, Troitsk, Moscow Region
关键词
D O I
10.1063/1.103150
中图分类号
O59 [应用物理学];
学科分类号
摘要
Surface interference, nonlinearly saturated instability of laser-induced thermodestruction, and subsequent oscillation of absorption mode permit the description of analytical ablation thresholds and depths per pulse of polymers having high absorption at laser wavelengths, e.g., polyimide and poly(ethylene terephtalate). Inverse problem solution for polycarbonate and ablation invariant designing are also realized.
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页码:1638 / 1640
页数:3
相关论文
共 22 条
[1]   THE ACTION OF POWERFUL LASER-RADIATION ON SURFACES OF SEMICONDUCTORS AND METALS - NONLINEAR OPTICAL EFFECTS AND NONLINEAR OPTICAL DIAGNOSTICS [J].
AKHMANOV, SA ;
EMELYANOV, VI ;
KOROTEYEV, NI ;
SEMINOGOV, VN .
USPEKHI FIZICHESKIKH NAUK, 1985, 147 (04) :675-745
[2]   DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J].
ANDREW, JE ;
DYER, PE ;
FORSTER, D ;
KEY, PH .
APPLIED PHYSICS LETTERS, 1983, 43 (08) :717-719
[3]   EXCIMER LASER ETCHING OF POLYIMIDE [J].
BRANNON, JH ;
LANKARD, JR ;
BAISE, AI ;
BURNS, F ;
KAUFMAN, J .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) :2036-2043
[4]  
Carslow HS, 1959, CONDUCTION HEAT SOLI
[5]   LASER-PHOTOETCHING CHARACTERISTICS OF POLYMERS WITH DOPANTS [J].
CHUANG, TJ ;
HIRAOKA, H ;
MODL, A .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 45 (04) :277-288
[6]   TIME RESOLVED TRANSMISSION STUDIES OF POLY(METHYL METHACRYLATE) FILMS DURING ULTRAVIOLET-LASER ABLATIVE PHOTODECOMPOSITION [J].
DAVIS, GM ;
GOWER, MC .
JOURNAL OF APPLIED PHYSICS, 1987, 61 (05) :2090-2092
[7]   EXCIMER LASER ABLATION AND THERMAL COUPLING EFFICIENCY TO POLYMER-FILMS [J].
DYER, PE ;
SIDHU, J .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) :1420-1422
[8]  
EMELYANOV VI, 1987, KVANTOVAYA ELEKTRON+, V14, P47
[9]  
FURZIKOV NP, 1990, PISMA ZH TEKH FIZ, V16
[10]   CALORIMETRIC AND ACOUSTIC STUDY OF ULTRAVIOLET-LASER ABLATION OF POLYMERS [J].
GORODETSKY, G ;
KAZYAKA, TG ;
MELCHER, RL ;
SRINIVASAN, R .
APPLIED PHYSICS LETTERS, 1985, 46 (09) :828-830