FORMATION OF MULTIPLY-TWINNED PARTICLES IN NUCLEATION STAGE OF FILM GROWTH

被引：31

作者：

OGAWA, S

INO, S

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 04期

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D O I：

10.1116/1.1315672

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：527 / &

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