THE EFFECT OF NITROGEN-CONTENT ON THE CRITICAL NORMAL FORCE IN SCRATCH TESTING OF TI-N FILMS

被引：10

作者：

VALLI, J ^{[1
]}

MOLARIUS, JM ^{[1
]}

KORHONEN, AS ^{[1
]}

机构：

[1] HELSINKI UNIV TECHNOL,DEPT MAT SCI & MIN,MET WORKING & HEAT TREATMENT LAB,SF-02150 ESPOO,FINLAND

来源：

THIN SOLID FILMS | 1987年 / 154卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(87)90378-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：351 / 360

页数：10

共 26 条

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