INCIDENT ANGLE DEPENDENCE OF THE MAGNETIC-PROPERTIES OF VACUUM-DEPOSITED CO-CR FILMS

被引:1
作者
TOHMA, K
KAWAWAKE, Y
SUGITA, R
机构
[1] Magnetic Devices Research Laboratory, Matsushita Electric Industrial Co., Ltd., Moriguchi, Osaka, 570, 3-1-1, Yagumo-nakamachi
关键词
D O I
10.1016/0304-8853(94)00255-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The incident angle and the substrate temperature dependence of the magnetic properties of continuously vacuum deposited Co-Cr films was investigated. The inclination of the easy axis from the film normal toward the film plane in the incidence plane became large with increasing incident angle. The magnetic anisotropy field of the films deposited at oblique incidence decreased with increasing substrate temperature. X-ray analysis and TEM observation showed that the magnetocrystalline anisotropy was dominant at low incident angle and the shape magnetic anisotropy was dominant at high incident angle. Also investigated was the effect of an initial layer on the magnetic properties and the crystal orientation of a Co-Cr film. The easy axis of the film was tilted by the Co-Cr initial layer deposited at high incident angle, because the c-axis tilted as a consequence of epitaxial growth on the initial layer.
引用
收藏
页码:342 / 347
页数:6
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