HF SPUTTERED INDIUM OXIDE-FILMS DOPED WITH TIN .2. REVERSIBLE AND IRREVERSIBLE TEMPERATURE-DEPENDENCE OF ELECTRICAL TRANSPORT PROPERTIES

被引：23

作者：

HOFFMANN, H ^{[1
]}

DIETRICH, A ^{[1
]}

PICKL, J ^{[1
]}

KRAUSE, D ^{[1
]}

机构：

[1] JENAER GLASWERK SCHOTT & GEN,ZENT FORSCHU & ENTWICKLUNG,D-6500 MAINZ,FED REP GER

来源：

APPLIED PHYSICS | 1978年 / 16卷 / 04期

关键词：

D O I：

10.1007/BF00885863

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：381 / 390

页数：10

共 11 条

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[2] HOFFMANN H, 1978, APPL PHYS
[3] ELECTROPHYSICAL PROPERTIES OF INDIUM OXIDE PYROLYTIC FILMS WITH DISORDERED STRUCTURE
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[J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1973, 20 (02): : 695 - 705
[4] OPTICAL AND ELECTRICAL PROPERTIES OF DOPED IN2O3 FILMS
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JOST, R
LEMS, W
[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1975, 29 (01): : 87 - 93
[5] CHARACTERIZATION OF TRANSPARENT CONDUCTIVE THIN-FILMS OF INDIUM OXIDE
MOLZEN, WW
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 99 - 102
[6] ELECTRICAL AND OPTICAL PROPERTIES OF SPUTTERED IN2O3 FILMS .I. ELECTRICAL PROPERTIES AND INTRINSIC ABSORPTION
MULLER, HK
[J]. PHYSICA STATUS SOLIDI, 1968, 27 (02): : 723 - &
[7] UNTERSUCHUNGEN DER ELEKTRISCHEN UND LICHTELEKTRISCHEN LEITFAHIGKEIT DUNNER INDIUMOXYDSCHICHTEN
RUPPRECHT, G
[J]. ZEITSCHRIFT FUR PHYSIK, 1954, 139 (05): : 504 - 517
[8] TRANSPARENT CONDUCTIVE SN-DOPED INDIUM OXIDE COATINGS DEPOSITED BY REACTIVE SPUTTERING WITH A POST CATHODE
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HEDGCOTH, VL
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 117 - 121
[9] VOSSEN JL, 1968, RCA REV, V29, P149
[10] VOSSEN JL, 1971, RCA REV, V32, P289