VAPOR DEPOSITION OF TUNGSTEN BY HYDROGEN REDUCTION OF TUNGSTEN HEXAFLUORIDE - PROCESS VARIABLES AND PROPERTIES OF DEPOSIT

被引:22
作者
BERKELEY, JF
BRENNER, A
REID, WE
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D O I
10.1149/1.2426649
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:561 / &
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