LASER-ASSISTED ACTIVATION AND METALLIZATION OF POLYIMIDES

被引：15

作者：

SHAFEEV, GA

机构：

[1] General Physics Institute, Russian Academy of Sciences, Moscow

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1992年 / 55卷 / 04期

关键词：

D O I：

10.1007/BF00324089

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Experimental results are presented on the maskless metallization of the surface of polyimides. In a certain range of laser parameters (Ar+ and copper-vapor lasers) the surface of polyimides irradiated in the air becomes catalytically active with respect to copper deposition from the solution for electroless copper plating. Copper lines 50-100 mum wide are deposited on the Kapton films with good adherence.

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页码：387 / 390

页数：4

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