NEW METHOD FOR MEASURING SPUTTERING IN REGION NEAR THRESHOLD

被引:48
作者
MCKEOWN, D
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D O I
10.1063/1.1717296
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:133 / &
相关论文
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