A HELMHOLTZ RESONATOR MODEL FOR AN ELECTROSTATIC ULTRASONIC AIR TRANSDUCER WITH A V-GROOVED BACKPLATE

被引:11
作者
HIETANEN, J
STORPELLINEN, J
LUUKKALA, M
MATTILA, P
TSUZUKI, F
SASAKI, K
机构
[1] TECH RES CTR FINLAND,SF-33101 TAMPERE,FINLAND
[2] UNIV TOKYO,FAC ENGN,DEPT PRECIS MACHINERY ENGN,BUNKYO KU,TOKYO 113,JAPAN
关键词
D O I
10.1016/0924-4247(93)80209-Y
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A model for the resonance frequency of an electrostatic ultrasonic air transducer with a uniformly grooved backplate is described based on the Helmholtz resonator theory. The resonance frequency of the transducer can be determined from the shape and dimensions of the backplate's grooves and the membrane's characteristics. In the case of a V-grooved backplate, the depth of the groove and the mass per unit area of the membrane are the parameters that determinate the resonance frequency. Experimental results suggest that the tension of the membrane seems to have only a very weak influence on the resonance frequency.
引用
收藏
页码:129 / 132
页数:4
相关论文
共 7 条
[1]   THE USE OF INTERFEROMETRY IN THE INVESTIGATION OF ULTRASOUND TRANSDUCERS [J].
CARR, H ;
RAFIQ, M ;
WYKES, C .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1989, 22 (04) :495-499
[2]   A MODEL FOR AN ELECTROSTATIC ULTRASONIC TRANSDUCER WITH A GROOVED BACKPLATE [J].
HIETANEN, J ;
STORPELLINEN, J ;
LUUKKALA, M .
MEASUREMENT SCIENCE AND TECHNOLOGY, 1992, 3 (11) :1095-1097
[3]  
Kinsler L. E., 1982, FUNDAMENTALS ACOUSTI, P225
[4]  
MORSE PM, 1968, THEORETICAL ACOUSTIC, P489
[6]   CAPACITANCE MICROPHONE DYNAMIC MEMBRANE DEFLECTIONS [J].
WARREN, JE ;
BRZEZINSKI, AM ;
HAMILTON, JF .
JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1973, 54 (05) :1201-1213
[7]  
ZUCKERWAR AJ, 1978, J ACOUST SOC AM, V65, P1278