PROPERTIES OF EPITAXIAL SILICON FILMS ON SPINEL BEFORE AND AFTER OXIDATION

被引：2

作者：

GASSMANN, F ^{[1
]}

AESCHLIMANN, R ^{[1
]}

BANZIGER, U ^{[1
]}

机构：

[1] ETH, INST TECH PHYS, ZURICH 8049, SWITZERLAND

来源：

MATERIALS RESEARCH BULLETIN | 1972年 / 7卷 / 12期

关键词：

D O I：

10.1016/0025-5408(72)90186-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1493 / 1496

页数：4

共 6 条

[1] CHEMICAL POLISHING OF MAGNESIUM ALUMINATE SPINEL IN PYROPHOSPHORIC ACID [J].

AESCHLIM.R ;

GASSMANN, F ;

WOODMAN, TP .

MATERIALS RESEARCH BULLETIN, 1970, 5 (03) :167-&

[2] EPITAXIAL GROWTH AND PROPERTIES OF SILICON ON ALUMINA-RICH SINGLE-CRYSTAL SPINEL [J].

CULLEN, GW ;

GOTTLIEB, GE ;

WANG, CC ;

ZAININGER, KH .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (10) :1444-+

[3] EPITAXIAL SILICON FILMS ON SPINEL BY EVAPORATION IN ULTRAHIGH VACUUM [J].

GASSMANN, F ;

DELLACAS.A ;

AESCHLIMANN, R .

MATERIALS RESEARCH BULLETIN, 1971, 6 (09) :817-+

[4] EPITAXIAL FILMS OF SILICON ON SPINEL BY VACUUM EVAPORATION [J].

ITOH, T ;

HASEGAWA, S ;

KAMINAKA, N .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (06) :2597-&

[5] EFFECTS OF OXIDATION ON ELECTRICAL CHARACTERISTICS OF SILICON-ON-SAPPHIRE FILMS [J].

ROSS, EC ;

WARFIELD, G .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (05) :2339-&

[6] MECHANICAL AND ELECTRICAL PROPERTIES OF EPITAXIAL SILICON FILMS ON SPINEL [J].

SCHLOTTERER, H .

SOLID-STATE ELECTRONICS, 1968, 11 (10) :947-+

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