ACOUSTIC-WAVE THERMAL SENSITIVITY - TEMPERATURE TEMPERATURE COMPENSATION IN MICROSENSORS

被引：16

作者：

HOUMMADY, M

HAUDEN, D

机构：

[1] Laboratoire de Physique et Métrologie des Oscillateurs, C.N.R.S. associé à l'Université de Franche-Comté-Besançon, 25044 Besançon Cedex

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 44卷 / 03期

关键词：

ACOUSTIC WAVES; MICROSENSORS; TEMPERATURE SENSORS;

D O I：

10.1016/0924-4247(94)00802-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In the field of temperature measurements, microsensors are based on different physical transduction principles, such as semiconductor parameters (conductivity, pn junction voltage), metallic junction voltage (thermocouple) or elastic wave velocity variations (bulk or surface acoustic waves). This paper discusses acoustic-based temperature microsensors. Thermal effects are modelled and applications to bulk and surface acoustic wave microsensors are presented. Moreover, the-use of temperature sensing for other measurements (thermal flow and humidity sensors) is described. Improvements of sensitivities and response time by varying the operating temperature are also pointed out for gas detectors. Possibilities of temperature compensation in silicon acoustic wave microsensors are discussed.

引用

页码：177 / 182

页数：6

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