Crystallization of amorphous nano-sized silicon powders

被引：8

作者：

Dutta, J ^{[1
]}

Reaney, IM ^{[1
]}

Bossel, C ^{[1
]}

Houriet, R ^{[1
]}

Hofmann, H ^{[1
]}

机构：

[1] ECOLE POLYTECH FED LAUSANNE,DEPT MAT,LAB CERAM,CH-1015 LAUSANNE,SWITZERLAND

来源：

NANOSTRUCTURED MATERIALS | 1995年 / 6卷 / 1-4期

关键词：

D O I：

10.1016/0965-9773(95)00104-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The crystallization phenomena of nano-sized silicon powders (similar to 20 nm) prepared by Plasma induced reaction of silane were studied using in-situ heating in vacuum (<10(-8) Torr) in a high resolution transmission electron microscope (HRTEM) and ex-situ annealing in forming gas monitored by X-ray diffraction (XRD). In-situ HRTEM measurements suggest that the primary crystallization process passes through two distinct regions: the formation of nano-crystallites which is followed by a sintering step which results in an increase in crystallite sizes. Further, from XRD spectra we interprete that smaller crystallites form these larger grains which are observed by TEM.

引用

页码：493 / 496

页数：4