SURFACE CLEANING BY LOW-TEMPERATURE BOMBARDMENT WITH HYDROGEN PARTICLES - AES INVESTIGATION ON COPPER AND FE-CR-NI STEEL SURFACES

被引:12
作者
BOUWMAN, R
VANMECHELEN, JB
HOLSCHER, AA
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 01期
关键词
D O I
10.1116/1.569444
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:91 / 94
页数:4
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