A DOUBLE-MODULATION PHOTOELECTRIC ELLIPSOMETER

被引：13

作者：

WILMANNS, I

机构：

[1] Institut d'Optique, Paris (XVe), 3, Boulevard Pasteur

来源：

SURFACE SCIENCE | 1969年 / 16卷

关键词：

D O I：

10.1016/0039-6028(69)90013-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The instrument uses for the first time simultaneous modulation of azimuth and phase at two different frequencies. The principle is particularly well suited for automation. It is possible to adjust at the same time azimuth and phase independently of each other. Measurements are taken with a precision of one minute of arc. The spectral range of the instrument extends from 0.22 to 2.5 μm. © 1969.

引用

页码：147 / &