INSTRUMENT-INVARIANT METHOD OF FILM THICKNESS DETERMINATION BY MEANS OF SUBSTRATE-TO-FILM X-RAY PEAK INTENSITY RATIOING

被引：3

作者：

CHURMS, CL ^{[1
]}

KRITZINGER, S ^{[1
]}

机构：

[1] UNIV STELLENBOSCH,DEPT PHYS,DIV SOLID STATE,STELLENBOSCH 7600,SOUTH AFRICA

来源：

关键词：

D O I：

10.1016/0040-6090(87)90121-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：67 / 74

页数：8

共 5 条

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ARCHULETA, TA ;

STUPIN, DM .

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[3]

HO Y, 1982, SCANNING ELECTRON MI, V2, P559

[4] X-RAY STUDIES RELATED TO COATING THICKNESS MEASUREMENTS [J].

SEWELL, DA ;

HALL, ID ;

LOVE, G ;

PARTRIDGE, JP ;

SCOTT, VD .

JOURNAL DE PHYSIQUE, 1984, 45 (NC-2) :33-36

[5]

WASHKO SD, 1977, SCANNING ELECTRON MI, V1, P713