NUCLEATION OF ISLANDS IN GAAS MOLECULAR-BEAM EPITAXY STUDIED BY IN-SITU SCANNING ELECTRON-MICROSCOPY

被引:5
作者
INOUE, N [1 ]
OSAKA, J [1 ]
HOMMA, Y [1 ]
机构
[1] NIPPON TELEGRAPH & TEL PUBL CORP, INTERDISCIPLINARY LABS, MUSASHINO, TOKYO 180, JAPAN
关键词
D O I
10.1016/0022-0248(94)00951-1
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We studied two-dimensional nucleation of islands in the molecular beam epitaxy (MBE) of GaAs by in-situ scanning electron microscopy and found that the islands do not appear until about 1/3 monolayer is deposited. In contrast to what is expected from the previous simple nucleation and growth model, we observed islands to form continuously.
引用
收藏
页码:107 / 109
页数:3
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