HIGH-RATE DEPOSITION OF THICK PIEZOELECTRIC ZNO FILMS USING A NEW MAGNETRON SPUTTERING TECHNIQUE

[1] ZINC OXIDE FILM TRANSDUCERS - (PIEZOELECTRICS - ULTRASONICS - TRANSDUCERS - EFFICIENCY - E) [J]. APPLIED PHYSICS LETTERS, 1966, 8 (09) : 221 - +

[2] HATA T, 1979, SEP ULTR S P, P936

[3] Hata T., 1979, JPN J APPL PHYS, V18, P219, DOI [10.7567/JJAPS.18S1.219, DOI 10.7567/JJAPS.18S1.219]

[4] HIKERNELL FS, 1972, APPL PHYS LETT, V21, P389

[5] MINAKATA M, 1973, JOINT M PROFESSIONAL, P25

[6] Waits R.K., 1978, THIN FILM PROCESSES, p[24, 131]

[1] ZINC OXIDE FILM TRANSDUCERS - (PIEZOELECTRICS - ULTRASONICS - TRANSDUCERS - EFFICIENCY - E) [J]. APPLIED PHYSICS LETTERS, 1966, 8 (09) : 221 - +

[2] HATA T, 1979, SEP ULTR S P, P936

[3] Hata T., 1979, JPN J APPL PHYS, V18, P219, DOI [10.7567/JJAPS.18S1.219, DOI 10.7567/JJAPS.18S1.219]

[4] HIKERNELL FS, 1972, APPL PHYS LETT, V21, P389

[5] MINAKATA M, 1973, JOINT M PROFESSIONAL, P25

[6] Waits R.K., 1978, THIN FILM PROCESSES, p[24, 131]