THE EFFECT OF ATOMIC-HYDROGEN ON DIAMOND-LIKE CARBON-FILM PRODUCTION

被引：8

作者：

DOWLING, DP

OBRIEN, TP

DAVITT, EM

DONNELLY, K

KELLY, TC

DOEBELE, HF

KORNAS, V

GRAHAM, WG

CHESHIRE, R

HIGGINS, M

MORROW, T

机构：

[1] UNIV ESSEN GESAMTHSCH,INST LASER & PLASMA PHYS,W-4300 ESSEN 1,GERMANY

[2] QUEENS UNIV BELFAST,DEPT PHYS,BELFAST BT7 1NN,ANTRIM,NORTH IRELAND

来源：

关键词：

D O I：

10.1016/0925-9635(94)90252-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A method of making quantitative measurements of atomic hydrogen levels in diamond-like carbon (DLC) deposition plasmas is discussed. Multiphoton laser induced fluorescence (MPLIF) is used to detect ground state hydrogen atoms. The choice of excitation scheme to maximize the ratio of fluorescence signal to ionization is explained. The MPLIF measurements are calibrated using a combination of a flow reactor and titration absolute standard, and a transferable hot filament atomic hydrogen source specifically designed for installation in the DLC deposition system. The characteristics of the complete system are described, and initial measurements in hot filament reactors are presented.

引用

页码：702 / 705

页数：4

共 6 条

[1] STRESS COMPENSATION IN GAAS-AL0.24GA0.76AS1-YPY LPE BINARY LAYERS [J].