MEASUREMENT OF MINORITY-CARRIER LIFETIME AND DIFFUSION LENGTH IN SILICON EPITAXIAL LAYERS BY MEANS OF PHOTOCURRENT TECHNIQUE

被引:12
作者
MULLER, J
BERNT, H
REICHL, H
机构
关键词
D O I
10.1016/0038-1101(78)90175-2
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:999 / 1003
页数:5
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