INTERNAL STRESS OF ELECTROLESS METAL FILMS ON SINGLE CRYSTAL SILICON

被引：3

作者：

AUSTEN, HE

FISHER, RD

机构：

来源：

关键词：

D O I：

10.1149/1.2411791

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：185 / &

共 11 条

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