ELECTRON AND CHEMICAL-KINETICS IN METHANE RF GLOW-DISCHARGE DEPOSITION PLASMAS

[1] RADIATION FROM CH4 AND C2H4 PRODUCED BY ELECTRON IMPACT [J]. PHYSICA, 1971, 53 (01): : 32 - +

[2] Albritton DL., 1978, ATOM DATA NUCL DATA, V22, P1, DOI DOI 10.1016/0092-640X(78)90027-X

[3] A SIMPLE FORMULA FOR DIFFUSION CALCULATIONS INVOLVING WALL REFLECTION AND LOW-DENSITY [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (04) : 1141 - 1148

[4] TOTAL AND PARTIAL ELECTRON COLLISIONAL IONIZATION CROSS-SECTIONS FOR CH4, C2H6, SIH4, AND SI2H6 [J]. JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (04) : 1770 - 1777

[5] Ellis H. W., 1978, Atomic Data and Nuclear Data Tables, V22, P179, DOI 10.1016/0092-640X(78)90014-1

[6] Ellis H. W., 1976, Atomic Data and Nuclear Data Tables, V17, P177, DOI 10.1016/0092-640X(76)90001-2

[7] SOME NEW RESULTS ON THE FABRICATION OF AND THE MECHANICAL, ELECTRICAL AND OPTICAL-PROPERTIES OF I-CARBON LAYERS [J]. THIN SOLID FILMS, 1981, 80 (1-3) : 227 - 234

[8] NEGATIVE-ION KINETICS IN RF GLOW-DISCHARGES [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1986, 14 (02) : 92 - 102

[9] ELECTRICAL-PROPERTIES OF THIN CARBON-FILMS OBTAINED BY RF METHANE DECOMPOSITION ON AN RF-POWERED NEGATIVELY SELF-BIASED ELECTRODE [J]. THIN SOLID FILMS, 1986, 136 (02) : 161 - 166

[10] HINDMARSH AC, 1973, SCI COMPUT, P55

[1] RADIATION FROM CH4 AND C2H4 PRODUCED BY ELECTRON IMPACT [J]. PHYSICA, 1971, 53 (01): : 32 - +

[2] Albritton DL., 1978, ATOM DATA NUCL DATA, V22, P1, DOI DOI 10.1016/0092-640X(78)90027-X

[3] A SIMPLE FORMULA FOR DIFFUSION CALCULATIONS INVOLVING WALL REFLECTION AND LOW-DENSITY [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (04) : 1141 - 1148

[4] TOTAL AND PARTIAL ELECTRON COLLISIONAL IONIZATION CROSS-SECTIONS FOR CH4, C2H6, SIH4, AND SI2H6 [J]. JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (04) : 1770 - 1777

[5] Ellis H. W., 1978, Atomic Data and Nuclear Data Tables, V22, P179, DOI 10.1016/0092-640X(78)90014-1

[6] Ellis H. W., 1976, Atomic Data and Nuclear Data Tables, V17, P177, DOI 10.1016/0092-640X(76)90001-2

[7] SOME NEW RESULTS ON THE FABRICATION OF AND THE MECHANICAL, ELECTRICAL AND OPTICAL-PROPERTIES OF I-CARBON LAYERS [J]. THIN SOLID FILMS, 1981, 80 (1-3) : 227 - 234

[8] NEGATIVE-ION KINETICS IN RF GLOW-DISCHARGES [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1986, 14 (02) : 92 - 102

[9] ELECTRICAL-PROPERTIES OF THIN CARBON-FILMS OBTAINED BY RF METHANE DECOMPOSITION ON AN RF-POWERED NEGATIVELY SELF-BIASED ELECTRODE [J]. THIN SOLID FILMS, 1986, 136 (02) : 161 - 166

[10] HINDMARSH AC, 1973, SCI COMPUT, P55