FATIGUE AND REFRESHMENT OF (PB, LA)TIO3 THIN-FILMS BY MULTIPLE CATHODE SPUTTERING

被引：28

作者：

MAIWA, H ^{[1
]}

ICHINOSE, N ^{[1
]}

OKAZAKI, K ^{[1
]}

机构：

[1] WASEDA UNIV,SCH SCI & ENGN,DEPT MAT SCI & ENGN,SHINJUKU KU,TOKYO 169,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 9B期

关键词：

FERROELECTRIC THIN FILM; NVRAM; FATIGUE; REFRESHMENT; MULTIPLE SPUTTERING; (PH; LA)TIO3; DC BIAS APPLICATION; HEAT TREATMENT; DEFECT DIPOLE; NONSWITCHED CHARGE;

D O I：

10.1143/JJAP.33.5240

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The ferroelectric fatigue and refreshment of (Pb, La)TiO3 thin films bg multiple cathode rf-magnetron sputtering were investigated. The remanent polarization of the fatigued (Pb, La)TiO3 thin films increased after the application of the DC bias voltage of -20 V for 10(4) s. By heat treatment of the fatigued films at 400 degrees C for 1 h, the coercive field decreased. and squareness of the loop was improved, These behaviors were discussed from the viewpoint of the behavior of defect dipoles.

引用

页码：5240 / 5243

页数：4

共 19 条

[1] INTERNAL BIAS IN FERROELECTRIC CERAMICS - ORIGIN AND TIME-DEPENDENCE [J].

ARLT, G ;

NEUMANN, H .

FERROELECTRICS, 1988, 87 :109-120

[2]

BELLUR KR, 1992, 8TH P IEEE INT S APP, P448

[3] INTEGRATED SOL-GEL PZT THIN-FILMS ON PT, SI, AND GAAS FOR NONVOLATILE MEMORY APPLICATIONS [J].

DEY, SK ;

ZULEEG, R .

FERROELECTRICS, 1990, 108 :37-46

[4] GRAIN-SIZE EFFECTS IN FERROELECTRIC SWITCHING [J].

DUIKER, HM ;

BEALE, PD .

PHYSICAL REVIEW B, 1990, 41 (01) :490-495

[5] FATIGUE AND SWITCHING IN FERROELECTRIC MEMORIES - THEORY AND EXPERIMENT [J].

DUIKER, HM ;

BEALE, PD ;

SCOTT, JF ;

DEARAUJO, CAP ;

MELNICK, BM ;

CUCHIARO, JD ;

MCMILLAN, LD .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (11) :5783-5791

[6] PREPARATION AND SWITCHING KINETICS OF PB(ZR, TI)O3 THIN-FILMS DEPOSITED BY REACTIVE SPUTTERING [J].

HASE, T ;

SHIOSAKI, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B) :2159-2162

[7]

JOHNSON DJ, 1990, MATER RES SOC SYMP P, V200, P289, DOI 10.1557/PROC-200-289

[8]

Lines M. E., 1977, PRINCIPLES APPLICATI, P112

[9] CRYSTALLINE-STRUCTURE OF PBTIO3 THIN-FILMS BY MULTIPLE CATHODE SPUTTERING [J].

MAIWA, H ;

ICHINOSE, N ;

OKAZAKI, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (9B) :3029-3032

[10]

MAIWA H, UNPUB JPN J APPL PHY

← 1 2 →