AUTOMATIC ELLIPSOMETRY WITHOUT A PHASE PLATE

被引:9
作者
LISSBERGER, PH
SALTER, IW
FITZPATRICK, M
TAYLOR, PL
机构
[1] QUEENS UNIV BELFAST, DEPT PURE & APPL PHYS, BELFAST BT7 1NN, NORTH IRELAND
[2] UNIV SALFORD, DEPT ELECT ENGN, SALFORD M5 4WT, LANCASHIRE, ENGLAND
来源
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1977年 / 10卷 / 06期
关键词
D O I
10.1088/0022-3735/10/6/019
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:635 / 641
页数:7
相关论文
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