THEORETICAL DESCRIPTION OF GAS-FILM INTERACTION ON SNOX

被引：90

作者：

ZEMEL, JN ^{[1
]}

机构：

[1] UNIV PENN,CTR SENSOR TECHNOL,PHILADELPHIA,PA 19104

来源：

THIN SOLID FILMS | 1988年 / 163卷

关键词：

The author would like to acknowledge the hosp~tallty and support of the University of Neuchatel's Institut de Mlcrotechmque and the FRSM during the period when this work was conducted. He would especially hke to thank Dr. S. C Chang for reviewing the manuscript; Professor S. Roy Morrlson for a valuable critique of the assumptions and both Professor N. de Roolj and Dr. M. Ducloux for useful discussions;

D O I：

10.1016/0040-6090(88)90424-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：189 / 202

页数：14

共 15 条

[1] BODE DE, 1966, PHYS THIN FILMS, V3, P275
[2] CHANG SC, 1986, FUNDAMENTALS APPLICA, P58
[3] DEMARNE V, 1987, 4TH INT C SOL STAT S, P605
[4] Egashira M., 1986, FUNDAMENTALS APPLICA, P71
[5] LECTURES ON GAS-SOLID INTERACTIONS
GREEN, M
[J]. SENSORS AND ACTUATORS, 1981, 1 (03): : 379 - 391
[6] HEILAND G, 1982, SENSOR ACTUATOR, V2, P343, DOI 10.1016/0250-6874(81)80055-8
[7] KANG WP, 1987, 4TH INT C SOL STAT S, P610
[8] Kroger F. A., 1974, CHEM IMPERFECT CRYST
[9] SENSITIVE HALL MEASUREMENTS ON NACL AND ON PHOTOCONDUCTIVE PBTE
LEVY, JL
[J]. PHYSICAL REVIEW, 1953, 92 (02): : 215 - 218
[10] Lundstrom I, 1985, SOLID STATE CHEM SEN

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