SYNTHESIS OF SEMICONDUCTIVE DIAMOND ON DIAMOND SUBSTRATE FROM GAS-PHASE

被引：5

作者：

KAMO, M ^{[1
]}

YURIMOTO, H ^{[1
]}

SATO, Y ^{[1
]}

SETAKA, N ^{[1
]}

机构：

[1] UNIV TSUKUBA,INST GEOSCI,SAKURA,IBARAKI 305,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575260

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1818 / 1819

页数：2

共 9 条

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[3]

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[4]

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[7] GROWTH OF DIAMOND THIN-FILMS BY ELECTRON ASSISTED CHEMICAL VAPOR-DEPOSITION [J].

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[8] VAPOR GROWTH OF DIAMOND ON DIAMOND AND OTHER SURFACES [J].

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[9] PREPARATION OF SEMICONDUCTING DIAMONDS [J].

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