ELASTIC PROPERTIES OF SILICON OXYNITRIDE FILMS DETERMINED BY PICOSECOND ACOUSTICS

被引：46

作者：

GRAHN, HT

MARIS, HJ

TAUC, J

HATTON, KS

机构：

[1] BROWN UNIV,DEPT PHYS,PROVIDENCE,RI 02912

[2] BROWN UNIV,DIV ENGN,PROVIDENCE,RI 02912

[3] RUTGERS STATE UNIV,CTR CERAM RES,PISCATAWAY,NJ 08854

来源：

关键词：

D O I：

10.1063/1.100253

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2281 / 2283

页数：3

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