THERMAL-DIFFUSIVITY OF DIAMOND FILMS SYNTHESIZED FROM METHANE BY ARC-DISCHARGE PLASMA-JET CVD

被引:4
作者
BOUDINA, A
FITZER, E
NETZELMANN, U
REISS, H
机构
[1] TECH UNIV KARLSRUHE,INST TECH CHEM,W-7500 KARLSRUHE,GERMANY
[2] FRAUNHOFER INST NONDESTRUCT TESTING,W-6600 SAARBRUCKEN 11,GERMANY
关键词
D O I
10.1016/0925-9635(93)90237-V
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond films 10-36 mum thick were synthesized via d.c. plasma jet chemical vapour deposition. The films were separated from their silicon substrates by dissolving the silicon in aqueous HF. Examinations of the free-standing diamond films by scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy and Raman spectroscopy have shown that the quality of the films is close to that of natural diamond. The thermal diffusivities of the films were measured at room temperature by the thermal wave mirage technique. This method allows local measurements representative of an area of about 1 mm2. The measured values (1.6-2.5 cm2 s-1) were higher than those of copper (1.25 cm2 s-1) and silicon (0.86 cm2 s-1).
引用
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页码:852 / 858
页数:7
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