CATHODIC ARC DEPOSITION TECHNOLOGY

被引：47

作者：

LINDFORS, PA ^{[1
]}

MULARIE, WM ^{[1
]}

机构：

[1] UNIV MINNESOTA, DEPT ELECT ENGN, MINNEAPOLIS, MN 55455 USA

来源：

关键词：

D O I：

10.1016/0257-8972(86)90001-0

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：275 / 290

页数：16

共 72 条

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HOLMES, R .

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[5]

Aksenov I. I., 1978, Soviet Physics - Technical Physics, V23, P651

[6]

Aksenov I. I., 1981, Soviet Technical Physics Letters, V7, P497

[7]

Aksenov I. I., 1979, SOV J PLASMA PHYS, V5, P341

[8]

AKSENOV II, 1984, HIGH TEMP+, V22, P517

[9]

AKSENOV II, 1978, INSTRUM EXP TECH+, V21, P1416

[10]

AKSENOV II, 1979, INSTRUM EXP TECH+, V22, P785