CATHODIC ARC DEPOSITION TECHNOLOGY

被引:47
作者
LINDFORS, PA [1 ]
MULARIE, WM [1 ]
机构
[1] UNIV MINNESOTA, DEPT ELECT ENGN, MINNEAPOLIS, MN 55455 USA
关键词
D O I
10.1016/0257-8972(86)90001-0
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:275 / 290
页数:16
相关论文
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