FURTHER EVALUATION OF THE HIGH-INTENSITY PLASMA SPUTTER HEAVY NEGATIVE-ION SOURCE

被引:31
作者
MORI, Y
ALTON, GD
TAKAGI, A
UENO, A
FUKUMOTO, S
机构
关键词
D O I
10.1016/0168-9002(88)90790-5
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
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页码:5 / 12
页数:8
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