MICROSTRUCTURAL GLASS MODIFICATIONS IN AS-FIRED AND HIGH-VOLTAGE-SURGED RUO2-BASED THICK-FILM RESISTORS

被引:9
作者
ADACHI, K [1 ]
IIDA, S [1 ]
ISHIGAME, J [1 ]
SEKIHARA, S [1 ]
机构
[1] SUMITOMO MET MIN CO,DIV ELECTR,OME,TOKYO 198,JAPAN
关键词
D O I
10.1557/JMR.1991.1729
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Electrical conduction in thick film resistors has been studied, and microstructures, especially around conducting RuO2 phases in a lead-borosilicate glass matrix in as-fired and high-voltage-surged thick film resistors, have been observed in detail using transmission electron microscopy. Lattice images of as-fired thick film resistors have suggested the presence of subtle structural modifications in the very thin area across the RuO2/glass interface, whereas in the glass matrix very small dot-like contrasts on the order of 1 nm were occasionally observed and were interpreted as being small crystallites or Ru clusters. Heavy electrical loadings of thick film resistors were found to induce the local formation of plate-like crystals in glass, which were identified by electron diffraction to be a slightly modified anorthite. The significance of these observations in terms of the conduction network and the degradation due to the electrical overloading of thick film resistors are discussed.
引用
收藏
页码:1729 / 1735
页数:7
相关论文
共 16 条
[1]  
ADACHI K, 1991, IN PRESS INT S MICRO
[2]  
ANGUS HC, 1968, ELECTRONIC COMPONENT, V9, P84
[3]  
[Anonymous], 1974, FELDSPAR MINERALS
[4]  
Ansell M. P., 1976, Electrocomponent Science and Technology, V3, P141, DOI 10.1155/APEC.3.141
[5]  
BORG IY, 1968, AM MINERAL, V53, P1709
[6]   INFLUENCE OF METAL MIGRATION FROM SCREEN-AND-FIRED TERMINATIONS ON ELECTRICAL CHARACTERISTICS OF THICK-FILM RESISTORS [J].
CATTANEO, A ;
COCITO, M ;
FORLANI, F ;
PRUDENZIATI, M .
ELECTROCOMPONENT SCIENCE AND TECHNOLOGY, 1977, 4 (3-4) :205-211
[7]   ELECTRICAL-CONDUCTION BY PERCOLATION IN THICK-FILM RESISTORS [J].
FORLANI, F ;
PRUDENZIATI, M .
ELECTROCOMPONENT SCIENCE AND TECHNOLOGY, 1976, 3 (02) :77-83
[8]  
HILL RM, 1979, 2ND P EUR HYBR MICR, P95
[9]  
Mott NF., 1979, ELECT PROCESSES NONC
[10]  
Nishigaki S., 1985, Proceedings of the 1985 International Symposium on Microelectronics, P225