SIMPLE AND QUICK ROTATIONAL TEMPERATURE DETERMINATION IN N2-CONTAINING DISCHARGE PLASMA

被引：10

作者：

JANCA, J

SKRICKA, L

BRABLEC, A

机构：

[1] Department of Physical Electronics, Masaryk University Brno, Brno, 611 37

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1993年 / 13卷 / 03期

关键词：

ROTATIONAL TEMPERATURE; PLASMA-CHEMICAL REACTIONS; QUICK TEMPERATURE DETERMINATION; DISCHARGE PLASMA DIAGNOSTICS;

D O I：

10.1007/BF01465883

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

A quick spectroscopic method of rotational temperature determination based on the low-resolution emission spectrum of the N2 (v' = 2 --> v'' = 0) vibronic band profile of the second positive system was developed The new method of molecular gas temperature determination was used in an rf glow discharge excited in N2 and N2 + Ar + B2H6 gas mixture at a pressure range 500-1300 Pa. This method of molecular gas temperature measurement is applicable to nonisothermic plasmas used in plasma-chemical reactors.

引用

页码：567 / 577

页数：11

共 15 条

[1] SPECTROSCOPIC INVESTIGATIONS OF HIGH-CURRENT HOLLOW-CATHODE DISCHARGES IN FLOWING NITROGEN AT LOW PRESSURES [J].