DIFFUSION-LIMITED SI PRECIPITATION IN EVAPORATED AL/SI FILMS

被引：102

作者：

VANGURP, GJ ^{[1
]}

机构：

[1] PHILIPS RES LABS,EINDHOVEN,NETHERLANDS

来源：

关键词：

D O I：

10.1063/1.1662511

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2040 / 2050

页数：11

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