OPTICAL-DETECTION OF PHOTOACOUSTIC PULSES IN THIN SILICON-WAFERS

被引：6

作者：

SONTAG, H

TAM, AC

机构：

[1] IBM Almaden Research Cent, San Jose,, CA, USA, IBM Almaden Research Cent, San Jose, CA, USA

来源：

CANADIAN JOURNAL OF PHYSICS | 1986年 / 64卷 / 09期

关键词：

NONPROPAGATING PLATE MODE - OPTICAL DETECTION - PHOTOACOUSTIC PULSES - PROBE-BEAM DEFLECTION - THIN SILICON WAFERS;

D O I：

10.1139/p86-233

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1330 / 1333

页数：4

共 17 条

[1]

HORAWITZ P, 1980, ART ELECTRONICS, P288

[2]

Hutchins D. A., 1983, 1983 Ultrasonics Symposium Proceedings, P1175

[3] LASER GENERATION AS A STANDARD ACOUSTIC SOURCE IN METALS [J].

HUTCHINS, DA ;

DEWHURST, RJ ;

PALMER, SB ;

SCRUBY, CB .

APPLIED PHYSICS LETTERS, 1981, 38 (09) :677-679

[4] PHOTOTHERMAL DEFLECTION SPECTROSCOPY AND DETECTION [J].

JACKSON, WB ;

AMER, NM ;

BOCCARA, AC ;

FOURNIER, D .

APPLIED OPTICS, 1981, 20 (08) :1333-1344

[5] PHASE VARIATION OF FOCUSED SURFACE ACOUSTIC-WAVE [J].

JEN, CK ;

CIELO, P ;

BUSSIERE, J ;

NADEAU, F ;

FARNELL, GW .

APPLIED PHYSICS LETTERS, 1985, 46 (03) :241-243

[6] MEASUREMENT OF ELASTIC CONSTANTS AT LOW TEMPERATURES BY MEANS OF ULTRASONIC WAVES - DATA FOR SILICON AND GERMANIUM SINGLE CRYSTALS, AND FOR FUSED SILICA [J].

MCSKIMIN, HJ .

JOURNAL OF APPLIED PHYSICS, 1953, 24 (08) :988-997

[7] HETERODYNE INTERFEROMETRIC LASER PROBE TO MEASURE CONTINUOUS ULTRASONIC DISPLACEMENTS [J].

MONCHALIN, JP .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1985, 56 (04) :543-546

[8]

NADEAU F, 1984, 1984 P IEEE ULTR S, P921

[9]

NIKANOROV SP, 1972, FIZ TVERD TELA+, V13, P2516

[10] THERMAL-WAVE DETECTION AND THIN-FILM THICKNESS MEASUREMENTS WITH LASER-BEAM DEFLECTION [J].

OPSAL, J ;

ROSENCWAIG, A ;

WILLENBORG, DL .

APPLIED OPTICS, 1983, 22 (20) :3169-3176

← 1 2 →