INTRINSIC STRESS AND STRUCTURAL-PROPERTIES OF MIXED COMPOSITION THIN-FILMS

被引：31

作者：

SANKUR, H

GUNNING, WJ

DENATALE, JF

机构：

来源：

APPLIED OPTICS | 1988年 / 27卷 / 08期

关键词：

D O I：

10.1364/AO.27.001564

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：1564 / 1567

页数：4

共 10 条

[1] USE OF EQUIVALENT FILMS IN DESIGN OF INFRARED MULTILAYER ANTIREFLECTION COATINGS [J].

BERNING, PH .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (04) :431-&

[2] OPTICAL-PROPERTIES OF SIO2-TIO2 COMPOSITE FILMS [J].

DEMIRYONT, H .

APPLIED OPTICS, 1985, 24 (16) :2647-2650

[3]

DENATALE JF, 1986, DEC MAT RES S BOST

[4]

FUJIWARA S, 1963, J OPT SOC AM, V53, P1317

[5] REFRACTIVE INDICES OF EVAPORATED CERIUM DIOXIDE-CERIUM FLUORIDE FILMS [J].

FUJIWARA, S .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1963, 53 (07) :880-&

[6] EVAPORATED INHOMOGENEOUS THIN FILMS [J].

JACOBSSON, R ;

MARTENSSON, JO .

APPLIED OPTICS, 1966, 5 (01) :29-+

[7] ORIGIN OF MECHANICAL-STRESS IN VACUUM-DEPOSITED MGF2 AND ZNS FILMS [J].

PULKER, HK ;

MASER, J .

THIN SOLID FILMS, 1979, 59 (01) :65-76

[8]

SANKUR H, 1986, DEC MAT RES S BOST

[9] COATING DESIGN USING VERY THIN HIGH-INDEX AND LOW-INDEX LAYERS [J].

SOUTHWELL, WH .

APPLIED OPTICS, 1985, 24 (04) :457-460

[10] VARIABLE REFRACTIVE-INDEX OPTICAL COATINGS [J].

YADAVA, VN ;

SHARMA, SK ;

CHOPRA, KL .

THIN SOLID FILMS, 1973, 7 (02) :243-252

← 1 →