PATTERNING OF HIGH-TC Y-BA-CU-O THIN-FILMS DEPOSITED ON BARE SILICON

被引：8

作者：

HABERMEIER, HU

MERTENS, G

机构：

来源：

PHYSICA C | 1989年 / 162卷

关键词：

D O I：

10.1016/0921-4534(89)91167-2

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：601 / 602

页数：2

共 7 条

[1] RAPID THERMAL ANNEALING OF YBACUO FILMS ON SI AND SIO2 SUBSTRATES [J].

ASLAM, M ;

SOLTIS, RE ;

LOGOTHETIS, EM ;

AGER, R ;

MIKKOR, M ;

WIN, W ;

CHEN, JT ;

WENGER, LE .

APPLIED PHYSICS LETTERS, 1988, 53 (02) :153-155

[2] LOW-TEMPERATURE PREPARATION OF SUPERCONDUCTING YBA2CU3O7-DELTA FILMS ON SI, MGO, AND SRTIO3 BY THERMAL COEVAPORATION [J].

BERBERICH, P ;

TATE, J ;

DIETSCHE, W ;

KINDER, H .

APPLIED PHYSICS LETTERS, 1988, 53 (10) :925-926

[3] PREPARATION AND SUBSTRATE REACTIONS OF SUPERCONDUCTING Y-BA-CU-O FILMS [J].

GURVITCH, M ;

FIORY, AT .

APPLIED PHYSICS LETTERS, 1987, 51 (13) :1027-1029

[4] THIN-FILMS OF Y-BA-CU-O ON SILICON AND SILICON DIOXIDE [J].

MOGROCAMPERO, A ;

TURNER, LG .

APPLIED PHYSICS LETTERS, 1988, 52 (14) :1185-1186

[5] SUPERCONDUCTING Y1BA2CU3O7-X FILMS ON SI [J].

VENKATESAN, T ;

CHASE, EW ;

WU, XD ;

INAM, A ;

CHANG, CC ;

SHOKOOHI, FK .

APPLIED PHYSICS LETTERS, 1988, 53 (03) :243-245

[6] GROWTH OF HIGH-TC SUPERCONDUCTING THIN-FILMS USING MOLECULAR-BEAM EPITAXY TECHNIQUES [J].

WEBB, C ;

WENG, SL ;

ECKSTEIN, JN ;

MISSERT, N ;

CHAR, K ;

SCHLOM, DG ;

HELLMAN, ES ;

BEASLEY, MR ;

KAPITULNIK, A ;

HARRIS, JS .

APPLIED PHYSICS LETTERS, 1987, 51 (15) :1191-1193

[7] LOW-TEMPERATURE PREPARATION OF HIGH-TC SUPERCONDUCTING THIN-FILMS [J].

WU, XD ;

INAM, A ;

VENKATESAN, T ;

CHANG, CC ;

CHASE, EW ;

BARBOUX, P ;

TARASCON, JM ;

WILKENS, B .

APPLIED PHYSICS LETTERS, 1988, 52 (09) :754-756

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