ELLIPSOMETRIC INVESTIGATIONS OF A SUBSTRATE-THIN FILM SYSTEM WITH ROUGH BOUNDARIES USING THE EQUIVALENT FILM THEORY

被引：12

作者：

BRUDZEWSKI, K

机构：

[1] Institute of General Chemistry, Technical University of Warsaw, 00-664 Warsaw

来源：

THIN SOLID FILMS | 1979年 / 61卷 / 02期

关键词：

D O I：

10.1016/0040-6090(79)90460-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The optical effect of surface roughness on a scale below the wavelength of light can be represented as a transitional layer between the bulk substrate and the surrounding medium. Then the roughness is equivalent in optical properties to a thin film on a smooth flat substrate. The theory of equivalent film is modified to interpret ellipsometric data and changes of the ellipsometric parameters are calculated. The theoretical and experimental results obtained for a system formed by tungsten-tungsten oxide rough boundaries are compared. © 1979.

引用

页码：183 / 191

页数：9

共 14 条

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