DETERMINATION OF LAYERED SYNTHETIC MICROSTRUCTURE PARAMETERS

A method for determining the parameters of real layered synthetic microstructures (LSMs) of superthin films (the layer thickness is about 1-10 nm) is discussed. This method is based on the analysis of small angle X-ray diffraction spectra (lambda almost-equal-to 0.1 nm). The following LSM parameters have been determined: (1) concentration of atoms in the layers; (2) thickness of the layers and thickness of the interface between the LSM constituent layers; (3) characteristics of the layer thickness fluctuations. The Ni-C and Ni-Ti structures serve to illustrate the method. The potentialities of this technique in superthin film growth and diffusion investigation are demonstrated.