SUPERVISORY CONTROL OF A RAPID THERMAL MULTIPROCESSOR

被引：131

作者：

BALEMI, S

HOFFMANN, GJ

GYUGYI, P

WONGTOI, H

FRANKLIN, GF

机构：

[1] STANFORD UNIV,INFORMAT SYST LAB,STANFORD,CA 94305

[2] STANFORD UNIV,DEPT COMP SCI,STANFORD,CA 94305

来源：

IEEE TRANSACTIONS ON AUTOMATIC CONTROL | 1993年 / 38卷 / 07期

关键词：

D O I：

10.1109/9.231459

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

An application of supervisory control theory to a semiconductor manufacturing piece of equipment is presented. This approach allows the flexible design and reliable update of processing ''recipes'' to accommodate frequently changing manufacturing requirements. An input-output interpretation of supervisory control theory is given. This interpretation leads to a generic implementation scheme for manufacturing systems. A synthesis fixpoint algorithm implementation using binary decision diagrams enables the design of supervisors of realistic size. A sample synthesis for an oxide growth recipe is performed on a state space of the order of 10(6) states. The actual implementation of the logic sequencing control software for the application under investigation is described.

引用

页码：1040 / 1059

页数：20

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