MORPHOLOGY OF HIGH-RATE PHYSICAL-VAPOR-DEPOSITED TI AND CO

Electron-beam high-rate evaporation of hexagonal close packed metals yields highly-orientated vapor-deposited foils. The morphology of both titanium and cobalt are shown to be dependent on the deposition parameters. A change in deposition rate was found significantly to affect the structure of titanium foils. All temperatures and rates gave basal planes parallel to the substrate for the titanium foils. A change in substrate temperatures from 500 °C to 8oo °C for the cobalt affected both structure and texturing. At 5oo °C, the cobalt was oriented so that the basal plane of the foil was predominantly parallel to the substrate but was changed to about 40 degrees from the substrate at 8oo °C. © 1968.