Y-Ba-Cu oxide superconducting films were prepared by spray pyrolysis on (100) MgO substrates and alumina coated with a silver buffer layer. Acetate, nitrate, and oxide precursors were used as starting materials. The optimum starting compounds have been assessed and the effectiveness of rapid thermal processing as a fabrication tool for annealing of high T(c) superconducting films has been established. The superconducting behavior was found to be strongly dependent on the type of the precursor used, on the method of heat treatment, and on the substrate material. The films show preferred orientation and good adherence to the substrate. Transport measurements indicated that the films exhibited a superconducting transition with an onset temperature between 83-93 K and ending between 52-74 K. The critical current density was found to be strongly dependent on film processing.
