OPTIMIZATION OF 2-DIMENSIONAL GRATINGS FOR VERY LONG-WAVELENGTH QUANTUM-WELL INFRARED PHOTODETECTORS

被引：42

作者：

SARUSI, G ^{[1
]}

LEVINE, BF ^{[1
]}

PEARTON, SJ ^{[1
]}

BANDARA, KMS ^{[1
]}

LEIBENGUTH, RE ^{[1
]}

ANDERSSON, JY ^{[1
]}

机构：

[1] IND MICROELECTR CTR,S-16421 KISTA,SWEDEN

来源：

JOURNAL OF APPLIED PHYSICS | 1994年 / 76卷 / 09期

关键词：

D O I：

10.1063/1.357209

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have performed a detailed study of two-dimensional grating coupling for quantum well infrared photodetectors in the very long wavelength spectral region lambda similar to 16-17 mu m. Using calculations based on the modal expansion method we quantitatively explain the double peaked responsivity spectrum. By optimizing the grating parameters we achieve a normal incidence responsivity and detectivity which are three times larger than the 45 degrees angle of incidence geometry.

引用

收藏

页码：4989 / 4994

页数：6

相关论文

共 15 条

[1] GRATING-COUPLED QUANTUM-WELL INFRARED DETECTORS - THEORY AND PERFORMANCE [J].

ANDERSSON, JY ;

LUNDQVIST, L .

JOURNAL OF APPLIED PHYSICS, 1992, 71 (07) :3600-3610

[2] NEAR-UNITY QUANTUM EFFICIENCY OF ALGAAS/GAAS QUANTUM-WELL INFRARED DETECTORS USING A WAVE-GUIDE WITH A DOUBLY PERIODIC GRATING COUPLER [J].

ANDERSSON, JY ;

LUNDQVIST, L .

APPLIED PHYSICS LETTERS, 1991, 59 (07) :857-859

[3] QUANTUM EFFICIENCY ENHANCEMENT OF ALGAAS/GAAS QUANTUM-WELL INFRARED DETECTORS USING A WAVE-GUIDE WITH A GRATING COUPLER [J].

ANDERSSON, JY ;

LUNDQVIST, L ;

PASKA, ZF .

APPLIED PHYSICS LETTERS, 1991, 58 (20) :2264-2266

[4]

BECK WA, 1993, SEP P NATO ADV RES W

[5] 10-MU-M INFRARED HOT-ELECTRON TRANSISTORS [J].

CHOI, KK ;

DUTTA, M ;

NEWMAN, PG ;

SAUNDERS, ML ;

IAFRATE, GJ .

APPLIED PHYSICS LETTERS, 1990, 57 (13) :1348-1350

[6] BOUND TO CONTINUUM SUPERLATTICE MINIBAND LONG WAVELENGTH GAAS/ALXGA1-XAS PHOTOCONDUCTORS [J].

GUNAPALA, SD ;

LEVINE, BF ;

CHAND, N .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (01) :305-308

[7] LWIR 128X128 GAAS ALGAAS MULTIPLE QUANTUM-WELL HYBRID FOCAL PLANE ARRAY [J].

KOZLOWSKI, LJ ;

WILLIAMS, GM ;

SULLIVAN, GJ ;

FARLEY, CW ;

ANDERSON, RJ ;

CHEN, J ;

CHEUNG, DT ;

TENNANT, WE ;

DEWAMES, RE .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1991, 38 (05) :1124-1130

[8] QUANTUM-WELL INFRARED PHOTODETECTORS [J].

LEVINE, BF .

JOURNAL OF APPLIED PHYSICS, 1993, 74 (08) :R1-R81

[9]

LEVINE BF, 1991, SEMICOND SCI TECH, V6, P114

[10] III-V semiconductor device dry etching using ECR discharges [J].

Pearton, S. J. ;

Ren, F. ;

Fullowan, T. R. ;

Lothian, J. R. ;

Katz, A. ;

Kopf, R. F. ;

Abernathy, C. R. .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 1992, 1 (01) :18-27