REACTIONS AT THE TI/SIO2 INTERFACE STUDIED BY EELS

被引:6
作者
BUTZ, R
WAGNER, H
机构
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1986年 / 94卷 / 01期
关键词
D O I
10.1002/pssa.2210940107
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:71 / 76
页数:6
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