SUB-100 NM-RESOLUTION GRAZING-INCIDENCE SOFT-X-RAY MICROSCOPE WITH A LASER-PRODUCED PLASMA SOURCE

A high-resolution soft X-ray microscope was constructed using grazing incidence mirrors and a laser-produced plasma source. An Nd-YAG pulse laser (1.064 mum) was focused onto an aluminum target to produce soft X-rays above 4 nm in wavelength. The beam energy of the laser was 1.4 J, with a pulse width of 8 ns. The Wolter type-I mirror was used as an objective mirror and the toroidal mirror as a condenser. The magnification of the objective was 20. A holographic plate was used as a detector. Resolution of about 40 nm was achieved with a single shot.