共 7 条
[1]
FUNAKI Y, 1991, NIKKEI MICRODEVICES, P46
[2]
HARRIOT L, 1992, SPIE P, V1671
[3]
HASEGAWA N, 1991, SEMICONDUCTOR WORLD, P103
[4]
KATNANI AD, 1992, SPIE P, V1674
[5]
LIN BJ, 1990, SPIE, V1496, P54
[6]
Nakagawa K., 1990, International Electron Devices Meeting 1990. Technical Digest (Cat. No.90CH2865-4), P817, DOI 10.1109/IEDM.1990.237037
[7]
YANAGISHITA Y, 1991, SPIE P, V1463, P207