ELECTRICAL AND STRUCTURAL-PROPERTIES OF THIN GOLD-FILMS OBTAINED BY VACUUM EVAPORATION AND SPUTTERING

被引：68

作者：

ADAMOV, M ^{[1
]}

PEROVIC, B ^{[1
]}

NENADOVIC, T ^{[1
]}

机构：

[1] BORIS KIDRIC INST, POB 522, 11001 BELGRADE, YUGOSLAVIA

来源：

关键词：

D O I：

10.1016/0040-6090(74)90254-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：89 / 100

页数：12

共 14 条

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[3] HETEROGENEOUS NUCLEATION AT MACROSCOPIC STEPS
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[4] FACE-CENTRED CUBIC MODIFICATION IN SPUTTERED FILMS OF TANTALUM MOLYBDENUM TUNGSTEN RHENIUM HAFNIUM AND ZIRCONIUM
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DUFF, RH
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[5] ELECTRICAL RESISTIVITY STUDIES ON POLYCRYSTALLINE + EPITAXIALLY GROWN GOLD FILMS
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BOBB, LC
[J]. ACTA METALLURGICA, 1964, 12 (07): : 807 - &
[6] CHOPRA KL, 1969, THIN FILM PHENOMENA, P345
[7] COULTS TJ, 1971, THIN SOLID FILMS, V7, P77
[8] Dorey A. P., 1969, Thin Solid Films, V4, P445, DOI 10.1016/0040-6090(69)90093-5
[9] GOTTSCHE H, 1965, Z NATURFORSCH A, V11, P55
[10] EPITAXIAL GROWTH OF METALS ON ROCKSALT FACES CLOVEN IN VACUUM
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