LOW-LOSS HIGH-SILICA SINGLE-MODE CHANNEL WAVE-GUIDES

被引:50
作者
TAKATO, N
YASU, M
KAWACHI, M
机构
关键词
OPTICAL COMMUNICATION EQUIPMENT - Manufacture;
D O I
10.1049/el:19860220
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Low-loss high-silica single-mode channel optical waveguides of 0 multiplied by (times) 1 db/cm have been fabricated on crystal silicon substrates with fibre coupling losses of less than 0 multiplied by (times) 05 db by flame hydrolysis deposition and reactive ion etching. Directional couplers have also been fabricated with excess loss of 0 multiplied by (times) 5 db by this fabrication technique.
引用
收藏
页码:321 / 322
页数:2
相关论文
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KAWACHI, M ;
YASU, M ;
KOBAYASHI, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1983, 22 (12) :1932-1932
[2]  
KAWACHI M, 1985, JPN J APPL PHYS, V21, P314
[3]  
YAMADA Y, 1984, JPN J APPL PHYS, V20, P589