FABRICATION OF DIFFRACTIVE OPTICAL-COMPONENTS FOR AN EXTREME-ULTRAVIOLET SHEARING INTERFEROMETER

被引：1

作者：

SPECTOR, SJ

TENNANT, DM

TAN, Z

BJORKHOLM, JE

机构：

[1] AT&T BELL LABS,HOLMDEL,NJ 07733

[2] AT&T BELL LABS,BROOKHAVEN NATL LAB 510E,UPTON,NY 11973

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587452

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3846 / 3850

页数：5

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